journal article·2022-02

Enhanced thickness uniformity of large-scale α-Ga2O3 epilayers grown by vertical hot-wall mist chemical vapor deposition

Sun-Young Park, Minh-Tan Ha, Kyoung-Ho Kim, Le Van Lich, Yun-Ji Shin, Seong-Min Jeong, Se-Hun Kwon, Si-Young Bae

Ceramics International· Volume 48· Issue 4
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OpenAlex topics: Ga2O3 and related materials · ZnO doping and properties · Advanced Photocatalysis Techniques

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