Sol–gel derived PMN–PT thick films for high frequency ultrasound linear array applications
Source abstract
Abstract
Abstract A 12-µm PMN–PT [0.65Pb(Mg 1/3 Nb 2/3 )O 3 –0.35PbTiO 3 ] thick film was produced by alternate spin-coating of a ceramic powder/sol–gel composite and infiltration of the sol–gel. Using this technique, a high quality PMN–PT thick film was obtained, showing a permittivity e r of ~3300 and dielectric loss factor of ~0.02 at 1 kHz. Photolithographic and wet etching techniques were used to fabricate a 32-element linear array from the film. The completed array showed a center frequency of approximately 110 MHz and a bandwidth of 60% at −6 dB without a matching layer. The performance of the kerfless array was studied and compared to a kerfed array simulated with finite element analysis.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Acoustic Wave Resonator Technologies · Microwave Dielectric Ceramics Synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (22)
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1. High frequency ultrasound: a new frontier for ultrasound
2. Development of a 35-MHz piezo-composite ultrasound array for medical imaging10.1109/TUFFC.2006.1588408 ↗
3. Performance and characterization of new micromachined high-frequency linear arrays10.1109/TUFFC.2006.105 ↗
4. Fabrication and performance of a linear array based on a 1–3 composite with geometric elevation focusing10.1109/TUFFC.2007.473 ↗
5. High-frequency (>50MHz) medical ultrasound linear arrays produced by micromachining bulk PZT materials10.1109/TUFFC.2012.2193 ↗
6. A 100MHz ultrasonic transducer array using ZnO thin films10.1109/58.365245 ↗
7. Very high frequency (beyond 100MHz) PZT kerfless linear arrays10.1109/TUFFC.2009.1311 ↗
8. Micro-machined high-frequency (80MHz) PZT thick film linear arrays10.1109/TUFFC.2010.1680 ↗
9. Multiple matching scheme for broadband 0.72Pb(Mg1/3Nb2/3)O3–0.28PbTiO3 single crystal phased-array transducer10.1063/1.3065476 ↗
10. Single element high frequency (>50MHz) PZT sol–gel composite ultrasound transducers10.1109/58.818757 ↗
11. Piezoelectric films for high frequency ultrasonic transducers in biomedical applications10.1016/j.pmatsci.2010.09.001 ↗
12. Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications10.1063/1.2956408 ↗
13. Focused high frequency ZnO MEMS ultrasonic transducers for biomedical imaging10.1063/1.2712813 ↗
14. KNN/BNT composite lead free films for high frequency ultrasonic transducer applications10.1109/TUFFC.2011.1793 ↗
15. Aerosol-deposited KNN–LSO lead-free piezoelectric thick film for high frequency transducer applications10.1016/j.sna.2010.08.020 ↗
16. Pb(Mg1/3Nb2/3)O3–PbTiO3 thick films from mechanochemically synthesized powder10.1016/j.jeurceramsoc.2007.02.025 ↗
17. A large-displacement 65Pb(Mg1/3Nb2/3)O3–35PbTiO3/Pt bimorph actuator prepared by screen printing10.1016/j.snb.2008.04.004 ↗
18. Fabrication of pyrochlore free PMN–PT thick films by electrophoretic deposition10.1016/j.jallcom.2008.06.088 ↗
19. Processing and properties of 0.65Pb(Mg1/3Nb2/3)O3–0.35PbTiO3 thick films10.1016/j.jeurceramsoc.2008.06.010 ↗
20. Domain switching in lead magnesium niobate-lead titanate polycrystalline sheets at single grain level10.1063/1.2778359 ↗
21. 80-MHz intravascular ultrasound transducer using PMN–PT free-standing film10.1109/TUFFC.2011.2085 ↗
22. Lift-off PMN–PT thick film for high-frequency ultrasonic biomicroscopy10.1111/j.1551-2916.2010.03873.x ↗