Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis
Source abstract
Abstract
This paper presents a Raman spectroscopy study of the influence of methane flow on the micro-tribological behavior of diamond-like carbon coatings deposited with an industrial plasma-enhanced chemical vapor deposition system. Results have shown a direct relationship between the methane flow and thickness of the coatings. The analysis of the Raman spectra and deposition parameters allowed establishing the influence of H content with the methane flow, the disorder level and estimation of the sp3 fraction on the carbon coatings. The micro-tribology tests showed a strong dependence of the wear resistance and hardness with Raman parameters. The coating deposited at 72-sccm methane flow presented a thickness of 1.7 µm and a sp3 fraction of 0.33. This sp3 fraction gave rise to a hardness of 24 GPa and an excellent wear resistance of 3.3 × 10–6 mm3 N−1 mm−1 for this DLC coating. Wear tests showed a swelling in the wear profiles on this coating, which was associated with the occurrence of a re-hybridization process.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites
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References (43)
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