THE DEVELOPMENT OF PROCESSES AND APPARATUS OF TEMPERATURE GRADIENT CVD

Porous substrate,especially carbon bodies are densified by Chemical Vapor Deposition by establishing a thermal gradient cross the substrate,thermally decomposing a gaseous precursor so deposit an electrically and thermally conductive carbon within the substrate,and shifting the thermal gradient toward the lower temperature zone as deposition proceeds by means of induction heating.This work provides several processes and apparatus, to over come short comings of the state-of-the art isothermal and isobaric proceses and apparatus.The inductive heating and heaterless thermal gradient apparatus and process are the best select.