Nano Porous Films Processing of Polymer Films Based on Localized Surface Plasmon Resonance of Au Nanoparticles

We present a novel laser processing technique for nanoholes formation (d ~ 100 nm) on a polymer film based on resonant excitation of surface plasmon of Au nanoparticles. We succeeded in fabrication of a porous film with controlling of the density and position of the nanoholes in the film. The fundamental mechanism of the processing is superheating of Au nanoparticles by resonant excitation, with subsequent explosive vaporization to leave nanoholes.