The Design and Evaluating Method for The Scanning Strategy in Nano-second Laser Milling of Axisymmetric 3D Structure Micro Cone Consid-ering Its Symmetric Errors

Nanosecond laser milling has significant thermal effects, as a result, the shape accuracy of the manufactured microstructures is poor. At present, grooves, channels and slots are the most common objects in the studies on the effects of process parameters, such as laser power, laser frequency, scanning speed, on laser milling processing effects. However, the influences of scanning strategy on shape errors of micro 3D structures have rarely been researched. This paper focuses on the scanning strategy in nanosecond laser milling of axisymmetric 3D structures micro cones, on which symmetric errors depend. Firstly, the material removal calculation of nanosecond laser ablation is conducted and a design method on the scanning strategy of laser milling manufacturing of micro cones is proposed; Then, the evaluating method of scanning strategy is proposed where symmetry coefficient is used to quantify the spatial symmetry degree of scanning strategies; Finally, experiments are carried out to prove the validity of the proposed evaluation method of scanning strategy. The design and evaluating method of the scanning strategy in nanosecond laser milling of axisymmetric 3D structure are reasonable and are capable of being applied in the future.