http://www.jlps.gr.jp/jlmn/index.php?action=laser_volno&volno=303

Depositions of thin films, composed of Fe 81 BB 13.5 Si 3.5 Co 2 material were performed with ArF excimer laser ( = 193 nm). The material, with expected large magnetoelastic coefficient is potentially applicable in sensor and actuator technology. Depositions were done on polished <100> orientation Si substrates held at different temperatures: RT, 250 C, 450 C and 550 C. Results of AFM, MFM, SEM, EDS and FTIR measurements of the layers as a function of process parameters, in particular of the substrate temperature, are presented.