Auger spectroscopic investigation of a-C:H films on silicon microrelief substrates
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Advanced Surface Polishing Techniques · Metal and Thin Film Mechanics
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References (8)
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7. Gorbach · Electron. Techn. Ser. Mater. · 1991 · 4 · 54
8. Gorbach · Appl. Surf. Sci. · 1996 · 96–98 · 88110.1016/0169-4332(95)00583-8 ↗