High-Quality Surface Micromachining on Polymer Using Visible-LIBWE

Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan ROT Email: jycheng@gate.sinica.edu.tw 2 Institute of Biophotonics, National Yang-Ming University, Taipei 11221, Taiwan 3 Biophotonics & Molecular Imaging Research Center (BMIRC), National Yang-Ming University, Taipei 11221, Taiwan 4 Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan 5 Ph.D. Program in Microbial Genomics, National Chung Hsing University, 402, Taichung, Taiwan 6 Leibniz-Institut fur Oberflachenmodifizierung e.V. Permoserstrase 15, 04318 Leipzig, Germany