Estimate Pulsed Laser Drilling Aluminum Nitride (AlN) Ceramic: A Thermal Simulation and Experimental Analyze

This study performed thermal effect analysis and an experimental verification of the effects of ultrafast picosecond pulsed laser micro-drilling of aluminum nitride ceramic substrates. COMSOL Multiphysics was used to determine a laser drilling thermal field distribution; develop a thermal conductivity model; and further analyze the effects of different laser power levels, pulse durations, and focal points on hole diameter and hole depth after drilling. After results were obtained from the theoretical model, verification was performed through experiments. Using single-variable changes in laser power, laser pulse duration, and focal point, this study determined the relationships between each parameter and the machining effect and compared the simulation and experimental results.