An Efficient Surface Smoothing Method for Microstructures Based on Vibration-assisted Digital Grayscale Lithography

In this paper, an efficient surface smoothing method for improving the microstructure quality was proposed.A mechanical vibration-assisted smoothing microstructures surface strategy based on maskless grayscale lithography of digital micromirror device (DMD) was developed, which can effectively improve the microstructures surface quality and alleviate the effects of DMD pixel quantization errors.The experimental results showed that the micro-lens array microstructure surface roughness was reduced from 1.657 m to 0.207 m by the above strategy.The proposed method will have great potential for application in the field of micro-optical components high efficiency and high precision manufacturing.