Investigation of Thermochemical Reaction of Metallic Grooves Manufactured with Laser Micromachining in Liquid

Chemical reaction governing the overall etching process is the most significant factor in the determination of etching characteristics in laser-induced etching. A method of the sample preparation for measuring chemistry of the etchant and etched metallic groove is demonstrated. Also, chemical analyses of the used etchant and etched groove and derivation of the possible reactions between the stainless steel 304 workpiece and phosphoric acid during laser irradiation and non-irradiation are carried out based on the measured data of XPS, UV-VIS absorption, and ICP-mass, respectively in this paper.