Chromium in amorphous hydrogenated carbon based thin films prepared in a PACVD process
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Ion-surface interactions and analysis · Metal and Thin Film Mechanics
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References (6)
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2. Keudell A. Growth Mechanisms during the plasma enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry, IPP 9/110, Max Planck-Institut für Plasmaphysik, Garching, 1996.
3. Behrisch R., editor, Andersen H.H., contributor. Sputtering by particle bombardment/sputtering Yield measurements In: Springer-Topics in Applied Physics, 1981-1991.10.1007/3540105212_9 ↗
4. Ugolini D., Oelhafen P., Wittmer M., In: Koidl and Oelhafen P., editors, Amorphous hydrogenated carbon films. Les Ulis (France): Les Editions de Physique, 1987:297.
5. Schäfer J., Ristein J., Ley L., Electronic density of states and deep defects of hydrogenated amorphous carbon (a-C:H). In: Diamond Films, Portugal 1993.
6. Cylindrical spike model for the formation of diamondlike thin films by ion deposition10.1007/s003390050652 ↗