Influence of argon flow rate on the surface morphology and roughness of the DLC films prepared by MW ECR\PACVD
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Surface Roughness and Optical Measurements
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References (4)
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1. Characterization of pulsed laser-deposited diamond-like carbon films10.1016/S0257-8972(97)00686-5 ↗
2. Morphology and structural characterization of plasma-assisted prepared carbon films10.1016/0925-9635(95)00438-6 ↗
3. Surface roughness of diamond-like carbon films prepared using various techniques10.1016/S0257-8972(00)01139-7 ↗
4. Diamond-like carbon: present status10.1016/S0925-9635(99)00087-4 ↗