Principle and structure of a multi-chamber piezoelectric pump with large flow rate integrated into printed circuit board

Parametric simulation of multi-chamber piezoelectric pump proposed by authors shows that its flow rate is positively correlated with chamber compression ratio when height of chamber wall is not less than central deflection of circular piezoelectric unimorph actuator (CPUA). Therefore, in this paper, principle and structure of multi-chamber piezoelectric pump with novel CPUAs with three-layer structure are proposed and realized, so as to improve its chamber compression ratio, and then improve its flow rate. Its processing technology compatible with PCB processing technology is studied and its flow rate model is established. Central deflection of CPUA with three-layer structure and the flow rate characteristics are tested. Experimental results show that when the central deflection of CPUA with three-layer structure reaches the maximum value of 106.8 μm, the chamber compression ratio and flow rate of multi-chamber piezoelectric pump reach the maximum value of 50% and 3.11 mL/min, respectively. The maximum flow rate is increased by 622% compared to unimproved pump. By comparing experimental results with numerical and finite element simulation results, the realized multi-chamber piezoelectric pump has large flow rate and the established flow rate model can predict its flow rate.