Corrosion Behavior of Carbon Materials Used in Crystalline Silicon Furnace in Silicon Vapor

The experimental of silicon vapor corrosion under different corrosion conditions were carried out on different carbon materials (graphite, C/C, rigid carbon fiber felt (RCFF)), which were used as thermal field materials in silicon crystal growth furnace. The silicification corrosion behavior of the three carbon materials was studied. The results showed that the three carbon materials are easily corroded by silicon vapor at elevated temperature. The composition and microstructure of the three carbon materials have great influence on silicification corrosion behavior. Silicon