journal article·2023Open access

Characterization of High Temperature Resistivity and Full Matrix Material Coefficient of LGT Crystals

Maoxin SU, Xinchen LI, Kainan XIONG, Sheng WANG, Yunlin CHEN, Xiaoniu TU, Erwei SHI

Journal of Inorganic Materials· Volume 38· Issue 11

Abstract

应用微纳米材料研究所, 北京 100049; 2. 中国科学院 上海硅酸盐研究所, 上海 200050) 摘 要:基于声表面波(Surface acoustic wave, SAW)技术的无线无源器件是在极端条件下工作的首选传感器,其中 压电衬底在高温环境下的稳定性是影响 SAW 器件性能的关键因素。钽酸镓镧(LGT)晶体因电阻率高和稳定性好, 是 SAW 器件理想的高温压电衬底。为了全面评估 LGT 晶体的高温电阻率和材料系数稳定性,本工作分别测试了 纯 LGT 和掺铝钽酸镓镧(LGAT)晶体在氧气、氮气和氩气气氛中的高温电阻率,并采用超声谐振谱(Resonant ultrasound spectroscopy, RUS)技术定征了纯 LGT 晶体高温全矩阵材料系数。电阻率测试结果显示,在不同气氛下 LGT 晶体的高温导电行为明显不同,纯 LGT 晶体在 400 至 525 ℃范围内,氮气中的电阻率最高;在 525 至 700 ℃范 围内,氩气气氛中的电阻率最高,在 700 ℃时电阻率高达 2.05×10 6 Ω•cm;而对于 LGAT 晶体,在整个测试温度区 间氮气中的电阻率均最高,700 ℃电阻率达 1.
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OpenAlex topics: Electronic Packaging and Soldering Technologies · Silicon Carbide Semiconductor Technologies · Advanced MEMS and NEMS Technologies

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