journal article·2008-08-04

Effect of H2 Flow Rate on Microstructure and Optical Property of Nanocrystalline SiC Films

Wei YU

Journal of Inorganic Materials· Volume 23· Issue 3
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Silicon Carbide Semiconductor Technologies · ZnO doping and properties · Thin-Film Transistor Technologies

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References (14)

Show source-provided references
9. Zolper J C
10. Rajagopalan T10.1063/1.1609631 ↗
11. Wu X L
12. Maitinez F L10.1063/1.371008 ↗
14. Sun Yong