Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering Al+α-Al2O3 Target
Source abstract
Abstract
Al+-Al 2 O 3
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Metal and Thin Film Mechanics · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (22)
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