journal article·1999-04Open access

Insights on the deposition mechanism of sputtered amorphous carbon films

S. Logothetidis, M. Gioti, P. Patsalas, C. Charitidis

Carbon· Volume 37· Issue 5

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices

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References (28)

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