Thermodynamic Study of the Chemical Vapour Deposition in the SiBCHCl System
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Advanced ceramic materials synthesis · Thermal properties of materials · Silicon Carbide Semiconductor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (35)
Show source-provided references
1. J.J. Choury, C.O.M.D.E.F., Washington, September (1988).
2. Rogers · 1975 · 319
3. F.S. Galasso and R.D. Veltri, U.S. Patent, N° 4, 425, 407, (10 Jan. 1984).
4. R.D. Veltri and F.S. Galasso, U.S. Patent, N° 4, 476, 178, (9 Oct. 1984).
5. R.A. Holzl, U.S. Patent, N° 4, 515, 860 (7 May 1985).
6. D.M. Shuford, U.S. Patent, N°4, 471, 023, (11 Sept. 1984).
7. L.E. Mc Allister, IPN WO 88/07506 (6 Oct. 1988).
8. Mc Kee · Carbon · 1987 · 25 · 55110.1016/0008-6223(87)90197-7 ↗
9. G.V. Samsonov, Oxide Handbook.
10. Shiroky · G.A. Technologies Rept N°GA-A 18696 · 1986
11. Bernard · 1981 · 3
12. Salles · 1984 · 615
13. Thesis
14. Vandenbulcke · J. Electrochem. Soc. · 1981 · 128 · 158410.1149/1.2127687 ↗
15. Wang · 1984 · 81
16. Vandenbulcke · Thin Solid Films · 1983 · 102 · 14910.1016/0040-6090(83)90148-7 ↗
17. Vandenbulcke · 1983 · 44
18. Thesis
19. Constitution of Binary Alloys
20. Vandenbulcke · J. Less-Common Met. · 1981 · 82 · 4910.1016/0022-5088(81)90196-X ↗
21. The B-Si system10.1007/BF02872900 ↗
22. N.B.S. Special Publication 364
23. 1971
24. 1986
25. Armas · J. Less-Common Metals · 1981 · 82 · 24510.1016/0022-5088(81)90225-3 ↗
26. Dirkx · Calphad · 1987 · 11 · 16710.1016/0364-5916(87)90011-3 ↗
27. Spear · Bul. Alloys Phase Diagrams · 1987 · 8 · 44710.1007/BF02893154 ↗
28. Hong · J. Chem. Thermodynamics · 1978 · 10 · 79710.1016/0021-9614(78)90138-6 ↗
29. Domalski · J. Res. Nat. Bur. Stand. · 1968 · 72A · 13310.6028/jres.072A.013 ↗
30. Hillert · Acta Chem. Scand. · 1970 · 24 · 361810.3891/acta.chem.scand.24-3618 ↗
31. Sundman · J. Phys. Chem. Solids · 1981 · 42 · 29710.1016/0022-3697(81)90144-X ↗
32. Vincent · Thermochimica Acta · 1989 · 147 · 110.1016/0040-6031(89)85158-5 ↗
33. Golda · 1992 · 150 · 167
34. Barbier · 1986 · 10 · 206
35. Goujard · J. Electrochem. Soc. · 1994 · 141 · 45210.1149/1.2054748 ↗