A novel method ofrf powder sputtering
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OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Acoustic Wave Resonator Technologies
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References (18)
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1. Barna A, Barna P B, Pocza J F and Pozsgai I 1970Thin Solid Films 5 20110.1016/0040-6090(70)90094-5 ↗
2. Bosnell J and Thomas C B 1972Solid State Electron. 15 126110.1016/0038-1101(72)90047-0 ↗
3. Buckel W 1959Proc. Int. Conf. on Structure and Properties of thin films (eds) C A Neugebauer, J B Newkirk and D A Vermilyea (New York: John Wiley) p. 53
4. Chopra K L 1969Thin Film Phenomena (New York: McGraw Hill)
5. de Neufville J P 1972J. Non-Cryst. Solids 8–10 8510.1016/0022-3093(72)90121-4 ↗
6. Fritzsche H 1973Electronic and structural properties of amorphous semiconductors (eds) P G LeComber and J Mort (New York: Academic Press) p. 106
7. Grigorovici R 1969J. Non-Cryst. Solids 1 30310.1016/0022-3093(69)90027-1 ↗
8. Holland L 1956Vacuum deposition of thin films (Chapman and Hall) Chap. 14
9. Jackson G N 1970Thin Solid Films 5 20910.1016/0040-6090(70)90095-7 ↗
10. Kolomiets B T, Lantrotova S S, Lyubin V M, Pukh V P and Tagirdzhanov M A 1976Sov. Phys. Solid State 18 866
11. Lucovsky G, Mooradian A, Taylor W, Wright G B and Keezer R C 1967Solid State Commun. 5 133
12. Maissel L I and Glang R 1970Handbook of thin film technology (New York: McGraw Hill) Chap. 4
13. Nishino S, Matsunami H, Odaka M and Tanaka T 1977Thin Solid Films 40 L2710.1016/0040-6090(77)90096-7 ↗
14. Patten J W, McClanahan E D and Johnston J W 1971J. Appl. Phys. 42 437110.1063/1.1659782 ↗
15. Segmuller A 1973Thin Solid Films 18 28710.1016/0040-6090(73)90107-7 ↗
16. Sherman D 1977Thin Solid Films 45 53710.1016/0040-6090(77)90241-3 ↗
17. Tauc J 1970Optical properties of solids (ed) F Abeles (Amsterdam: North Holland)
18. Tellier C R and Tosser A J 1977Thin Solid Films 43 26110.1016/0040-6090(77)90287-5 ↗