Growth of polysilicon and silicide films for MOS-VLSI application
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and interfaces · Silicon Nanostructures and Photoluminescence
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References (18)
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1. Anderson R M 1973J. Electrochem. Soc. 120 154010.1149/1.2403299 ↗
2. Clarke L E and Zoroglu D S 1970Solid State Electron. 15 65310.1016/0038-1101(72)90008-1 ↗
3. Crowder B L and Zirinsky S 1979IEEE J. Solid State Circuits Sc-14,2 29110.1109/JSSC.1979.1051176 ↗
4. Dash W C and Newman R C 1955Phys Rev. 99 115110.1103/PhysRev.99.1151 ↗
5. Davidson U and Lee F 1969Proc. IEEE 57 153210.1109/PROC.1969.7332 ↗
6. Faggin F and Klein T 1970Solid State Electron. 13 112510.1016/0038-1101(70)90124-3 ↗
7. Feldman C, Norman A B, Charlis H K Jr. and Satkiewicz F G 1978J. Electron. Mater. 7 30910.1007/BF02655680 ↗
8. Fripp A L and Sterner R L 1970J. Electrochem. Soc. 117 156910.1149/1.2407386 ↗
9. Kamins T I 1975J. Appl. Phys. 46 524710.1063/1.321593 ↗
10. Kuhn G L and Rhee C J 1973J. Electrochem. Soc. 120 156310.1149/1.2403303 ↗
11. Kumar V 1976J. Electrochem. Soc. 123 26210.1149/1.2132801 ↗
12. Locker L D and Capio C D 1973J. Appl. Phys. 44 436610.1063/1.1661965 ↗
13. Mai C C, Whitehouse T S, Thomas R C and Goldstein D R 1971J. Electrochem. Soc. 118 33110.1149/1.2408040 ↗
14. Mei L, Rivier M, Kwark Y and Dutton R W 1981Silicon Semiconductor 81-5 1007
15. Murarka S P, Fraser D B, Sinha A K and Levinsten H J 1980IEEE Trans. Electron Device ED-27 140910.1109/T-ED.1980.20049 ↗
16. Richter H and Ley L 1981J. Appl. Phys. 52 728110.1063/1.328715 ↗
17. Veprek S, Iqbal Z, Oswald H R and Webb A P 1981Solid State Phys. 14 29510.1088/0022-3719/14/3/013 ↗
18. Wada Y and Nishimatsu S 1978J. Electrochem. Soc. 125 149910.1149/1.2131703 ↗