journal article·1997-09

Quantum chemical studies on initial surface process ina-Si: H plasma CVD

Hideomi Koinuma, Kenji Nakajima, Kaori Miyazaki

Bulletin of Materials Science· Volume 20· Issue 6
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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References (14)

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