journal article·2023-03-27

Role of temperature and Ar flow on the uniformity of epitaxial graphene grown on SiC

Zhenzhen Zhang, Dongxun Yang, Gang Dong, Rui Li, Yi Zhang, Ramiro Moro, Yanqing Ma, Lei Ma

Bulletin of Materials Science· Volume 46· Issue 2
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OpenAlex topics: Graphene research and applications · Silicon Carbide Semiconductor Technologies · Diamond and Carbon-based Materials Research

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