journal article·1997-09

Application of MO calculation to plasma-enhanced CVD using organosilicon compounds

Osamu Takai, Atsushi Hozumi, Yasushi Inoue, Takashi Komori

Bulletin of Materials Science· Volume 20· Issue 6
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Abstract

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Research context

OpenAlex topics: Surface Modification and Superhydrophobicity · Diamond and Carbon-based Materials Research · Plasma Diagnostics and Applications

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References (11)

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