Películas amorfas de SixCyN depositadas mediante ECR-PECVD
Source abstract
Abstract
Versión electrónica del poster presentado en la VI Reunión Nacional de Materiales, celebrado en 1999 en San Sebastián
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Source: openaire · Quality: needs review · Source record ↗
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References
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