journal article·2025-06

Comparison Between Epitaxial and Implanted Aluminum-Doped 4H-SiC

Suman Das, Daniel J. Lichtenwalner, Shane Stein, Jae Park, Philipp Steinmann, Sei-Hyung Ryu

Journal of Electronic Materials· Volume 54· Issue 6
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Abstract

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Research context

OpenAlex topics: Silicon Carbide Semiconductor Technologies · Silicon and Solar Cell Technologies · Semiconductor materials and interfaces

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References (12)

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