Tensile properties of aluminum/alumina multi-layered thin films
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OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Copper Interconnects and Reliability
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References (20)
Show source-provided references
1. M.F. Ashby and D. Jones,Engineering Materials, Pergamon Press, Oxford, 1980.
2. C.G. Andeen, C.W. Hagerling and R.W. Hoffman,Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces, Vienna, Austria, 1769 (1977).
3. R.W. Hoffman Jr., Masters Thesis, Case Western Reserve University, Cleveland, Ohio (1986).
4. R.W. Hoffman, Jr., T.E. Mitchell, and R.W. Hoffman,Thin Solid Films 154, 149 (1987).10.1016/0040-6090(87)90360-9 ↗
5. J.O. Stiegler and T.S. Noggle,Rev. Sci Instr. 32, 406 (1961).10.1063/1.1717388 ↗
6. D. Krus, Jr., G.T. Mearini, K. Chaffee and R.W. Hoffman,J. Vac. Sci. Tech. A9, 2488 (1991).10.1116/1.577261 ↗
7. B. Pruniaux, G. Grunberg, I. Melnick and M. Cordelle,Thin Solid Films 1, 417 (1967/68).10.1016/0040-6090(68)90070-9 ↗
8. E. Perrieu and B. Pruniaux,J. Electrochem. Soc.: Sol. State Sci. 116,1009 (1969).
9. J. Fridrich and K. Starosta,Thin Solid Films 15, S15 (1973).10.1016/0040-6090(73)90050-3 ↗
10. R.W. Hoffman,Mat. Res. Soc. Symp. Proc, Vol. 130, 295 (1989).10.1557/PROC-130-295 ↗
11. M.S. Hunter and P. Fowle,J. Electrochem. Soc. 103, 482 (1956).10.1149/1.2430389 ↗
12. W.J. Bernard and J.W. Cook,J. Electrochem. Soc. 106, 643 (1959).10.1149/1.2427463 ↗
13. N.R. Rajopadhye, S.B. Dake and S.V. Bhoraskar,Thin Solid Films 142, 127 (1986).10.1016/0040-6090(86)90308-1 ↗
14. F.F. Milillo, C. D’Antonio and R.W. Bauer,Thin Solid Films 3, 51 (1969).10.1016/0040-6090(69)90111-4 ↗
15. V.M. Koleshko, V.F. Belitsky and I.V. Kiryushin,Thin Solid Films 142, 199 (1986).10.1016/0040-6090(86)90005-2 ↗
16. K. Chaffee, G.T. Mearini and R. W Hoffman, unpublished.
17. M. Murakami,Thin Solid Films 55, 101 (1978).10.1016/0040-6090(78)90078-0 ↗
18. J.C. Grosskreutz,Surf. Sci. 8, 173 (1967).10.1016/0039-6028(67)90080-5 ↗
19. D.A. Hardwick,Thin Solid Films 154, 109 (1987).10.1016/0040-6090(87)90357-9 ↗
20. J. Grillhé,Mater. Sci. Forum 59 and 60, 481 (1990).