Direct, mass-analyzed ion-beam and arc-discharge deposition of diamondlike films
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (30)
Show source-provided references
1. M. W. Guinanand and J. H. Kinney, J. Nucl. Mater.103- 104, 1319 (1981).10.1016/0022-3115(82)90782-6 ↗
2. B. W. Dodson, Mat. Res. Soc. Symp. Proc.129, 29 (1989).10.1557/PROC-129-29 ↗
3. Y. Namba and T. Mori, J. Vac. Sei. and Technol.A3, 322 (1985).
4. D. A. Thompson, Rad. Eff.56, 105 (1985).10.1080/00337578108229885 ↗
5. T Takagi, Thin Solid Films92, 1 (1982).10.1016/0040-6090(82)90183-3 ↗
6. S. Aisenberg and R. Chabot, J. Appl. Phys.42, 2953 (1971).10.1063/1.1660654 ↗
7. T. Miyazawa, S. Misawa, S. Yoshida and S-I. Gonda, J. Appl. Phys.55, 188 (1984).10.1063/1.332862 ↗
8. J Ishikawa, Y. Takeiri, K. Ogawa and T. Takagi, J. Appl. Phys.61, 2509 (1987).10.1063/1.337925 ↗
9. C. Weissmantel, J. Vac. Sci. and Technol.18, 179 (1981).10.1116/1.570719 ↗
10. J. C. Agnus, P. Koidl and S. Domitz, in Plasma Deposited Thin Films, eds. J. Mort and F. Jansen (CRC, Boca Raton, FL, 1986), p. 89.
11. J. C. Agnus and F. Jansen, J. Vac. Sci. and Techol.A6, 1778 (1988).
12. A Anttila, J. Koskinen, R. Lappalainen, J-P. Hirvonen, D. Stone and C. Paszkiet, Appl. Phys. Lett.50, 132 (1987).10.1063/1.97693 ↗
13. T. R. Anthony, W. F. Banholzer, J. F. Fleischer, Lanhua Wei, P. K. Kuo, R. L. Thomas and R. W. Pryor, Phys. Rev.B42, 1104 (1990).10.1103/PhysRevB.42.1104 ↗
14. J-P. Hirvonen, J. Koskinen, A. Anttila, R. Lappalainen, R. O. Toivanen, E. Arminen and M. Trkula, Wear (1990), in press.
15. J-P. Hirvonen, J. Koskinen, R. Lappalainen, and A. Anttila, Mater. Sci. Forum52/53, eds. J. Pouch and S. A. Alterovitz (Trans. Techn. Publications, Aedermannsdorf, Switzerland, 1990), p. 197.
16. J. Koskinen, Appl. Phys. Lett.63, 2094 (1988).
17. A. Anttila, J. Koskinen, M. Bister and J-P. Hirvonen, Thin Solid Films136, 129 (1986).10.1016/0040-6090(86)90115-X ↗
18. CRC Handbook of Chemistry and Physics, 51st edn., (Chemical Rubber Co., Cleveland, OH, 1970) p. B–79.
19. F. Jansen, M. Machonkin, S. Kaplan and S. Hark, J. Vac. Sci. and Technol.A3, 605 (1985).10.1116/1.572960 ↗
20. D. S. Knight and W. B. White, J. Mater. Res.4, 385 (1989).10.1557/JMR.1989.0385 ↗
21. N. Wada, P. J. Gaczi and S. A. Solin, J. Non-Cryst. Solids35/36, 543 (1980).10.1016/0022-3093(80)90651-1 ↗
22. M. Ramsteiner, J. Wagner, Ch. Wild and P. Koidl, J. Appl. Phys.62, 729 (1987).10.1063/1.339754 ↗
23. B. Tother and J. Vetter, Wiss. Z.d.TU Karl-Marx-Stadt31, 433 (1989).
24. G. Eckhardt, J. Appl. Phys.46, 3282 (1975).10.1063/1.322043 ↗
25. W D. Davis and H. C. Miller, J. Appl. Phys.40, 2212 (1969).10.1063/1.1657960 ↗
26. S. D. Berger, D. R. McKenzie and P. J. Martin, Phil. Mag. Lett.57, 285 (1988).10.1080/09500838808214715 ↗
27. A. M. Dorodnov, Sov. Phys. Techn. Phys.23, 1058 (1978).
28. A. J. Maslov, G. K. Dmitriev and Yu. D. Chistyakov, In- strum. and Exp. Tech.28, 662 (1985).
29. D. Beeman, J. Silverman, R. Lynds and M. R. Anderson, Phys. Rev. B30, 870 (1984).10.1103/PhysRevB.30.870 ↗
30. J-P. Hirvonen, R. Lappalainen, J. Koskinen, A. Anttila, T. R. Jervis and M. Trkula, J. Mater. Res.5, (1990), in press.10.1557/JMR.1990.2524 ↗