Radiation damage effects on bipolar and MOS devices in X-Ray lithography
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design · Integrated Circuits and Semiconductor Failure Analysis
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References (11)
Show source-provided references
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8. S. Sze, “Physics of Semiconductor Devices,” 2nd Ed., Wiley, New York (1981).
9. E. Nicollian and J. Brews, “MOS Physics and Technology,” Wiley, New York (1982).
10. E. Snow, A. Grove and D. Fitzgerald, Proc. IEEE55, 1168 (1967).10.1109/PROC.1967.5776 ↗
11. C. Hsu, L. Wang, M. Wordeman and T. Ning, IEEE Electron Lett.10, 296 (1989).