journal article·1994-07

High uniformity of Al0.3Ga0.7As/ln0.15Ga0.85As doped-channel structures grown by molecular beam epitaxy on 3″ GaAs substrates

Yi-Jen Chan, Ming-Ta Yang, Tzu-Jin Yeh, Jen-Inn Chyi

Journal of Electronic Materials· Volume 23· Issue 7
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Abstract

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OpenAlex topics: Semiconductor Quantum Structures and Devices · Advancements in Semiconductor Devices and Circuit Design · Semiconductor materials and devices

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References (11)

Show source-provided references
1. R. Dingle, H.L. Stornier, A.C. Gossard and W. Wiegmann,Appl. Phys. Lett. 33, 665 (1978).10.1063/1.90457 ↗
2. T. Mimura, S. Hiyamizu, T. Fujii and K. Nanbu,Jpn. J. Appl. Phys. 19, L225 (1980).10.1143/JJAP.19.L225 ↗
3. M. Abe, T. Mimura, N. Kobayahi, M. Suzuki, M. Kosugi, M. Nakayama, K. Odani and I. Hanyu,IEEE Trans. Electron Devices 36, 2021 (1989).10.1109/16.40924 ↗
4. J.K. Abrokwah, N.C. Cirillo, Jr., M. J. Helix and M. Longerbone,J. Vac. Sci. Tech. B2, 209 (1984).
5. T.P. Chen, J.P. Tzou, K.S. Tseng, C.Y. Nee, M.S. Lin and T.S. Huang,MRL Bull. Rcs. Dev. ROC 1, 35 (1987).
6. R.R. Daniel, P.P. Ruden, M. Shur, D.E. Grider, T. Nohava and D. Arch,IEDM Tech. Digest 921 (1987).10.1109/IEDM.1987.191593 ↗
7. H. Hida, A. Okamoto, H. Toyoshima and K. Ohata,IEEE Trans. Electron Devices 34, 1448 (1987).10.1109/T-ED.1987.23105 ↗
8. J. Laskar, J. Kolodzey, A.A. Ketterson, I. Adesida and A.Y. Cho,IEEE Electron Device Lett. 11, 300 (1990).10.1109/55.56481 ↗
9. M.T. Yang, R.M. Lin, Y.J. Chan, J.L. Shieh and J.I. Chyi, presented at 20th Intl. Symp. on GaAs and Related Com- pounds, Freiburg, Germany 1993.
10. M. Gal, P.C. Taylor, B.F. Usher and P. J. Orders,J. Appl. Phys. 62, 3898 (1987).10.1063/1.339236 ↗
11. A.A. Ketterson, W.T. Masselink, J.S. Gedymin, J. Klem, C.K. Peng, W.F. Kopp, H. Morkoç and K.R. Gleason,IEEE Trans. Electron Devices 33, 564 (1986).10.1109/T-ED.1986.22533 ↗