Microstructure and properties of multilayer-derived tungsten silicide
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OpenAlex topics: Semiconductor materials and interfaces · Intermetallics and Advanced Alloy Properties · Surface and Thin Film Phenomena
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References (11)
Show source-provided references
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11. M.-A., Nicolet and S. S. Lau, in “VLSI Electronics, Microstructure Science,” Ed. by N. G. Einspruch and G. B. Larrabee, Academic Press, Inc., New York, U.S.A. 330, (1983).