journal article·1982-11

Plasma anodization of evaporated Al-InP systems

Y. Hirayama, H. M. Park, F. Koshiga, T. Sugano

Journal of Electronic Materials· Volume 11· Issue 6
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Abstract

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Research context

OpenAlex topics: Anodic Oxide Films and Nanostructures · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis

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References (24)

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