journal article·1994-02

Integrated in situ monitoring of a metalorganic vapor phase epitaxy reactor for II–VI epitaxy

S. J. C. Irvine, J. Bajaj, R. V. Gil

Journal of Electronic Materials· Volume 23· Issue 2
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Abstract

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Research context

OpenAlex topics: Advanced Semiconductor Detectors and Materials · Chalcogenide Semiconductor Thin Films · Additive Manufacturing Materials and Processes

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