journal article·1996-09

Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures

R. E. Sah, J. D. Ralston, J. Daleiden, E. C. Larkins, S. Weisser, J. Fleissner, W. Benz

Journal of Electronic Materials· Volume 25· Issue 9
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Abstract

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Research context

OpenAlex topics: Photonic and Optical Devices · Semiconductor Lasers and Optical Devices · Optical Coatings and Gratings

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References (16)

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