Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiN X /Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.