Redistribution of delta-doped Sb in Si
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Abstract
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Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies · Silicon Effects in Agriculture
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References (8)
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1. Nakagawa · Thin Solid Films · 1989 · 183 · 31510.1016/0040-6090(89)90456-2 ↗
2. Van Gorkum · J. Appl. Phys. · 1989 · 65 · 248510.1063/1.342794 ↗
3. Ghezzo · J. Electrochem. Soc. · 1972 · 119 · 97710.1149/1.2404381 ↗
4. Atomic Diffusion in Semiconductors
5. Sze · 1981
6. K. Nakagawa, M. Miyao and Y. Shiraki, unpublished.
7. Slijkerman · Appl. Phys. Letters · 1989 · 55 · 96310.1063/1.101690 ↗
8. Schubert · J. Appl. Phys. · 1990 · 67 · 196910.1063/1.345576 ↗