journal article·2009-05

Flow modulation effect on N incorporation into films during chemical beam epitaxy growth

H. Suzuki, K. Nishimura, K. Saito, Y. Ohshita, N. Kojima, M. Yamaguchi

Journal of Crystal Growth· Volume 311· Issue 10
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Abstract

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Research context

OpenAlex topics: Semiconductor Quantum Structures and Devices · Advanced Chemical Physics Studies · GaN-based semiconductor devices and materials

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References (12)

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