journal article·2002-05

The reactive ion etching of Bi2Ti2O7 thin films on silicon substrates and its image in atomic force microscopy

Zhuo Wang, Daliang Sun, Jifan Hu, Deliang Cui, Xiaohong Xu, Dong Wang, Yin Zhang, Min Wang, Hong Wang, Huanchu Chen et al.

Journal of Crystal Growth· Volume 240· Issue 3-4
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OpenAlex topics: Electronic and Structural Properties of Oxides · Ferroelectric and Piezoelectric Materials · Semiconductor materials and devices

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