journal article·2024-09

Preparation of high-hardness silicon-based antireflective optical coatings at low temperature and without calcination

Feifei Xu, Xin Dong, Qian Jia, Ruoyu Chen

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OpenAlex topics: Optical Coatings and Gratings · Thin-Film Transistor Technologies · Advanced Surface Polishing Techniques

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References (34)

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