Bionic Stepping Motors Driven by Piezoelectric Materials
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Abstract
Abstract By imitating the behavioral characteristics of some typical animals, researchers develop bionic stepping motors to extend the working range of piezoelectric materials and utilize their high accuracy advantage as well. A comprehensive review of the bionic stepping motors driven by piezoelectric materials is presented in this work. The main parts of stepping piezoelectric motors, including the feeding module, clamping module, and other critical components, are introduced elaborately. We classify the bionic stepping piezoelectric motors into inchworm motors, seal motors, and inertia motors depending on their main structure modules, and present the mutual transformation relationships among the three types. In terms of the relative position relationships among the main structure modules, each of the inchworm motors, seal motors, and inertia motors can further be divided into walker type, pusher type, and hybrid type. The configurations and working principles of all bionic stepping piezoelectric motors are reported, followed by a discussion of the advantages and disadvantages of the performance for each type. This work provides theoretical support and thoughtful insights for the understanding, analysis, design, and application of the bionic stepping piezoelectric motors.
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Research context
OpenAlex topics: Piezoelectric Actuators and Control · Innovative Energy Harvesting Technologies · Biomimetic flight and propulsion mechanisms
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References (100+)
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1. Lin, F. J., Hung, Y. C., & Chen, S. Y. (2009). FPGA-based computed force control system using elman neural network for linear ultrasonic motor. IEEE Transactions on Industrial Electronics, 56(4), 1238–1253. https://doi.org/10.1109/TIE.2008.200704010.1109/TIE.2008.2007040 ↗
2. Cheng, L., Liu, W. C., Hou, Z. G., Yu, J. Z., & Tan, M. (2015). Neural-network-based nonlinear model predictive control for piezoelectric actuators. IEEE Transactions on Industrial Electronics, 62(12), 7717–7727. https://doi.org/10.1109/TIE.2015.245502610.1109/TIE.2015.2455026 ↗
3. Wang, L., Wang, H. R., & Cheng, T. H. (2022). Design and performance of a compact stick-slip type piezoelectric actuator based on right triangle flexible stator. Smart Materials and Structures, 31(5), 055013. https://doi.org/10.1088/1361-665X/ac620610.1088/1361-665X/ac6206 ↗
4. Kang, B. W., & Kim, J. (2013). Design, fabrication, and evaluation of stepper motors based on the piezoelectric torsional actuator. IEEE/ASME Transactions on Mechatronics, 18(6), 1850–1854. https://doi.org/10.1109/TMECH.2013.226917110.1109/TMECH.2013.2269171 ↗
5. Wang, S. P., Rong, W. B., Wang, L. F., Pei, Z. C., & Sun, L. N. (2017). Design, analysis and experimental performance of a bionic piezoelectric rotary actuator. Journal of Bionic Engineering, 14, 348–355. https://doi.org/10.1016/S1672-6529(16)60403-110.1016/S1672-6529(16)60403-1 ↗
6. Wang, S. P., Rong, W. B., Wang, L. F., Pei, Z. C., & Sun, L. N. (2017). Design, analysis and experimental performance of a novel stick-slip type piezoelectric rotary actuator based on variable force couple driving. Smart Materials and Structures, 26(5), 055005. https://doi.org/10.1088/1361-665X/aa64c310.1088/1361-665X/aa64c3 ↗
7. Henke, B., Sawodny, O., & Neumann, R. (2015). Distributed parameter modeling of flexible ball screw drives using ritz series discretization. IEEE/ASME Transactions on Mechatronics, 20(3), 1226–1235. https://doi.org/10.1109/TMECH.2014.233377510.1109/TMECH.2014.2333775 ↗
8. Hwang, D., Ihn, Y. S., & Kim, K. (2018). Compact modular cycloidal motor with embedded shape memory alloy wires. IEEE Transactions on Industrial Electronics, 65(5), 4028–4038. https://doi.org/10.1109/TIE.2017.276483910.1109/TIE.2017.2764839 ↗
9. Mirvakili, S. M., & Hunter, I. W. (2018). Artificial muscles: Mechanisms, applications, and challenges. Advanced Materials, 30(6), 1704407. https://doi.org/10.1002/adma.20170440710.1002/adma.201704407 ↗
10. Lallart, M., Richard, C., Sukwisut, P., Petit, L., Guyomar, D., & Muensit, N. (2012). Electrostrictive bending actuators: Modeling and experimental investigation. Sensors and Actuators A: Physical, 179, 169–177. https://doi.org/10.1016/j.sna.2012.02.02310.1016/j.sna.2012.02.023 ↗
11. Santapuri, S., Scheidler, J. J., & Dapino, M. J. (2015). Two-dimensional dynamic model for composite laminates with embedded magnetostrictive materials. Composite Structures, 132, 737–745. https://doi.org/10.1016/j.compstruct.2015.04.06210.1016/j.compstruct.2015.04.062 ↗
12. Lv, Q. B., Yao, Z. Y., Jin, Y. Q., & Liu, B. (2022). Wear evaluation model of a linear piezoelectric ultrasonic motor considering temperature effect. Ultrasonics, 126, 106822. https://doi.org/10.1016/j.ultras.2022.10682210.1016/j.ultras.2022.106822 ↗
13. Lucinskis, R., Mazeika, D., & Bansevicius, R. (2018). Investigation of oscillations of piezoelectric actuators with multi-directional polarization. Mechanical Systems and Signal Processing, 99, 450–458. https://doi.org/10.1016/j.ymssp.2017.06.03610.1016/j.ymssp.2017.06.036 ↗
14. Yildirim, Y. A., Toprak, A., & Tigli, O. (2017). Piezoelectric membrane actuators for micropump applications using PVDF-TrFE. Journal of Microelectromechanical Systems, 27(1), 86–94. https://doi.org/10.1109/JMEMS.2017.277309010.1109/JMEMS.2017.2773090 ↗
15. Shafik, A., & Mrad, R. B. (2016). Piezoelectric motor technology: A review. In: Ru, C., Liu, X., & Sun, Y (Eds.), Nanopositioning Technologies (pp. 33–59). Springer, Cham. https://doi.org/10.1007/978-3-319-23853-1_210.1007/978-3-319-23853-1_2 ↗
16. Zhu, C., Chu, X. C., Yuan, S. M., Zhong, Z. J., Zhao, Y. Q., & Gao, S. N. (2016). Development of an ultrasonic linear motor with ultra-positioning capability and four driving feet. Ultrasonics, 72, 66–72. https://doi.org/10.1016/j.ultras.2016.07.01010.1016/j.ultras.2016.07.010 ↗
17. Han, S., Li, Z., Xu, Y. L., & Yang, X. F. (2022). Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators. Smart Materials and Structures, 31(11), 115004. https://doi.org/10.1088/1361-665X/ac93d210.1088/1361-665X/ac93d2 ↗
18. Poikselkä, K., Leinonen, M., Palosaari, J., Vallivaara, I., Röning, J., & Juuti, J. (2017). Novel genetically optimised high-displacement piezoelectric actuator with efficient use of active material. Smart Materials and Structures, 26(9), 095022. https://doi.org/10.1088/1361-665X/aa770a10.1088/1361-665X/aa770a ↗
19. Li, J. P., Zhou, X. Q., Zhao, H. W., Shao, M. K., Li, N., Zhang, S. Z., & Du, Y. M. (2016). Development of a novel parasitic-type piezoelectric actuator. IEEE/ASME Transactions on Mechatronics, 22(1), 541–550. https://doi.org/10.1109/TMECH.2016.260424210.1109/TMECH.2016.2604242 ↗
20. Esteves, G., Fancher, C. M., Röhrig, S., Maier, G. A., Jones, J. L., & Deluca, M. (2017). Electric-field-induced structural changes in multilayer piezoelectric actuators during electrical and mechanical loading. Acta Materialia, 132, 96–105. https://doi.org/10.1016/j.actamat.2017.04.01410.1016/j.actamat.2017.04.014 ↗
21. Kaufmann, P., Röhrig, S., Supancic, P., & Deluca, M. (2017). Influence of ferroelectric domain texture on the performance of multilayer piezoelectric actuators. Journal of the European Ceramic Society, 37(5), 2039–2046. https://doi.org/10.1016/j.jeurceramsoc.2016.12.02910.1016/j.jeurceramsoc.2016.12.029 ↗
22. Zhang, Y., Zhang, W. J., Hesselbach, J., & Kerle, H. (2006). Development of a two-degree-of-freedom piezoelectric rotary-linear actuator with high driving force and unlimited linear movement. Review of Scientific Instruments, 77(3), 035112. https://doi.org/10.1063/1.218550010.1063/1.2185500 ↗
23. Ho, S. T., & Jan, S. J. (2016). A piezoelectric motor for precision positioning applications. Precision Engineering, 43, 285–293. https://doi.org/10.1016/j.precisioneng.2015.08.00710.1016/j.precisioneng.2015.08.007 ↗
24. Lee, J. W., Li, Y. C., Chen, K. S., & Liu, Y. H. (2016). Design and control of a cascaded piezoelectric actuated two-degrees-of-freedom positioning compliant stage. Precision Engineering, 45, 374–386. https://doi.org/10.1016/j.precisioneng.2016.03.01510.1016/j.precisioneng.2016.03.015 ↗
25. Ham, Y. B., Seo, W. S., Cho, W. Y., Yun, D. W., Park, J. H., & Yun, S. N. (2009). Development of a piezoelectric pump using hinge-lever amplification mechanism. Journal of Electroceramics, 23(2), 346–350. https://doi.org/10.1007/s10832-008-9461-y10.1007/s10832-008-9461-y ↗
26. Na, T. W., Choi, J. H., Jung, J. Y., Kim, H. G., Han, J. H., Park, K. C., & Oh, I. K. (2016). Compact piezoelectric tripod manipulator based on a reverse bridge-type amplification mechanism. Smart Materials and Structures, 25(9), 095028. https://doi.org/10.1088/0964-1726/25/9/09502810.1088/0964-1726/25/9/095028 ↗
27. Chen, W. L., Zhang, X. M., Li, H., Wei, J. Y., & Fatikow, S. (2017). Nonlinear analysis and optimal design of a novel piezoelectric-driven compliant microgripper. Mechanism and Machine Theory, 118, 32–52. https://doi.org/10.1016/j.mechmachtheory.2017.07.01110.1016/j.mechmachtheory.2017.07.011 ↗
28. Chen, C. M., Hsu, Y. C., & Fung, R. F. (2012). System identification of a Scott-Russell amplifying mechanism with offset driven by a piezoelectric actuator. Applied Mathematical Modelling, 36(6), 2788–2802. https://doi.org/10.1016/j.apm.2011.09.06410.1016/j.apm.2011.09.064 ↗
29. Tian, Y. L., Shirinzadeh, B., Zhang, D. W., & Alici, G. (2009). Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation. Mechanical Systems and Signal Processing, 23(3), 957–978. https://doi.org/10.1016/j.ymssp.2008.06.00710.1016/j.ymssp.2008.06.007 ↗
30. Rios, S. A., & Fleming, A. J. (2015). Design of a charge drive for reducing hysteresis in a piezoelectric bimorph actuator. IEEE/ASME Transactions on Mechatronics, 21(1), 51–54. https://doi.org/10.1109/TMECH.2015.248373910.1109/TMECH.2015.2483739 ↗
31. Wang, H. R., Hu, M., & Li, Z. Q. (2016). Modelling and analysis of circular bimorph piezoelectric actuator for deformable mirror. Applied Mathematics and Mechanics, 37(5), 639–646. https://doi.org/10.1007/s10483-016-2077-810.1007/s10483-016-2077-8 ↗
32. Yong, Y. K., & Leang, K. K. (2016). Mechanical design of high-speed nanopositioning systems. In: Ru, C., Liu, X., Sun, & Y. (Eds.) Nanopositioning Technologies (pp. 61–121). Springer, Cham. https://doi.org/10.1007/978-3-319-23853-1_310.1007/978-3-319-23853-1_3 ↗
33. Nam, J., Oh, H., & Jang, G. (2016). Externally leveraged resonant piezoelectric actuator with fast response time for smart devices. IEEE/ASME Transactions on Mechatronics, 21(6), 2764–2772. https://doi.org/10.1109/TMECH.2016.259056410.1109/TMECH.2016.2590564 ↗
34. Belly, C., & Charon, W. (2012). Benefits of amplification in an inertial stepping motor. Mechatronics, 22(2), 177–183. https://doi.org/10.1016/j.mechatronics.2012.01.00610.1016/j.mechatronics.2012.01.006 ↗
35. Salisbury, S. P., Waechter, D. F., Mrad, R. B., Prasad, S. E., Blacow, R. G., & Yan, B. (2006). Design considerations for complementary inchworm actuators. IEEE/ASME Transactions on Mechatronics, 11(3), 265–272. https://doi.org/10.1109/TMECH.2006.87556510.1109/TMECH.2006.875565 ↗
36. Yokozawa, H., & Morita, T. (2015). Wireguide driving actuator using resonant-type smooth impact drive mechanism. Sensors and Actuators A: Physical, 230, 40–44. https://doi.org/10.1016/j.sna.2015.04.01210.1016/j.sna.2015.04.012 ↗
37. Cera, M., Cirelli, M., Colaiacovo, L., & Valentini, P. P. (2022). Second-order approximation pseudo-rigid model of circular arc flexure hinge. Mechanism and Machine Theory, 175, 104963. https://doi.org/10.1016/j.mechmachtheory.2022.10496310.1016/j.mechmachtheory.2022.104963 ↗
38. Harfensteller, F., Henning, S., Zentner, L., & Husung, S. (2022). Modeling of corner-filleted flexure hinges under various loads. Mechanism and Machine Theory, 175, 104937. https://doi.org/10.1016/j.mechmachtheory.2022.10493710.1016/j.mechmachtheory.2022.104937 ↗
39. Liu, X. H., Gao, L., Wu, Y., Song, H. R., & He, Y. (2022). Micro-displacement amplifier of giant magnetostrictive actuator using flexure hinges. Journal of Magnetism and Magnetic Materials, 556, 169415. https://doi.org/10.1016/j.jmmm.2022.16941510.1016/j.jmmm.2022.169415 ↗
40. Geva, K., Kahmann, H., Schlegel, C., & Kumme, R. (2022). Measurement uncertainty analysis of a measurement flexure hinge in a torque standard machine. Journal of Sensors and Sensor Systems, 11(2), 201–209. https://doi.org/10.5194/jsss-11-201-202210.5194/jsss-11-201-2022 ↗
41. Cammarata, A., Maddìo, P. D., Sinatra, R., Rossi, A., & Belfiore, N. P. (2022). Dynamic model of a conjugate-surface flexure hinge considering impacts between cylinders. Micromachines, 13(6), 957. https://doi.org/10.3390/mi1306095710.3390/mi13060957 ↗
42. Chen, F. X., Gao, Y. Z., Dong, W., & Du, Z. J. (2020). Design and control of a passive compliant piezo-actuated micro-gripper with hybrid flexure hinges. IEEE Transactions on Industrial Electronics, 68(11), 11168–11177. https://doi.org/10.1109/TIE.2020.303292110.1109/TIE.2020.3032921 ↗
43. Kim, I., Kim, Y. S., & Park, E. C. (2009). Sliding mode control of the inchworm displacement with hysteresis compensation. International Journal of Precision Engineering and Manufacturing, 10(3), 43–49. https://doi.org/10.1007/s12541-009-0046-810.1007/s12541-009-0046-8 ↗
44. Li, J. P., Zhao, H. W., Shao, M. K., Zhou, X. Q., Huang, H., & Fan, Z. Q. (2014). Design and experiment performances of an inchworm type rotary actuator. Review of Scientific Instruments, 85(8), 085004. https://doi.org/10.1063/1.489299810.1063/1.4892998 ↗
45. Kato, H., Hayakawa, K., Torii, A., & Ueda, A. (2000). XYΘ actuators using piezoelectric and electromagnetic actuators. Electrical Engineering in Japan, 131(4), 44–51. https://doi.org/10.1002/(SICI)1520-6416(200006)131:4%3c44::AID-EEJ6%3e3.0.CO;2-R10.1002/(SICI)1520-6416(200006)131:4<44::AID-EEJ6>3.0.CO;2-R ↗
46. Yan, S. Z., Zhang, F. X., Qin, Z., & Wen, S. Z. (2005). A 3-DOFs mobile robot driven by a piezoelectric actuator. Smart Materials and Structures, 15(1), N7–N13. https://doi.org/10.1088/0964-1726/15/1/N0210.1088/0964-1726/15/1/N02 ↗
47. Wen, J. M., Ma, J. J., Zeng, P., Cheng, G. M., & Zhang, Z. H. (2013). A new inertial piezoelectric rotary actuator based on changing the normal pressure. Microsystem Technologies, 19(2), 277–283. https://doi.org/10.1007/s00542-012-1684-910.1007/s00542-012-1684-9 ↗
48. Zeng, P., Wen, J., Cheng, G., Wu, B., & Yang, Z. (2006). Research on novel inertial piezoelectric actuator. Optics and Precision Engineering, 14(4), 623–627.
49. Wang, S. P., Rong, W. B., Wang, L. F., Pei, Z. C., & Sun, L. N. (2018). A novel inchworm type piezoelectric rotary actuator with large output torque: Design, analysis and experimental performance. Precision Engineering, 51, 545–551. https://doi.org/10.1016/j.precisioneng.2017.10.01010.1016/j.precisioneng.2017.10.010 ↗
50. Wang, S. P., Zhang, Z. H., Ren, L. Q., Zhao, H. W., Liang, Y. H., & Zhu, B. (2015). Design and driving characteristics of a novel ‘pusher’ type piezoelectric actuator. Smart Materials and Structures, 25(1), 015005. https://doi.org/10.1088/0964-1726/25/1/01500510.1088/0964-1726/25/1/015005 ↗
51. Oh, C. H., Choi, J. H., Nam, H. J., Bu, J. U., & Kim, S. H. (2010). Ultra-compact, zero-power magnetic latching piezoelectric inchworm motor with integrated position sensor. Sensors and Actuators A: Physical, 158(2), 306–312. https://doi.org/10.1016/j.sna.2010.01.02210.1016/j.sna.2010.01.022 ↗
52. Li, J. P., Zhao, H. W., Qu, X. T., Qu, H., Zhou, X. Q., Fan, Z. Q., Ma, Z. C., & Fu, H. S. (2015). Development of a compact 2-DOF precision piezoelectric positioning platform based on inchworm principle. Sensors and Actuators A: Physical, 222, 87–95. https://doi.org/10.1016/j.sna.2014.12.00110.1016/j.sna.2014.12.001 ↗
53. Wang, S. P., Rong, W. B., Wang, L. F., Xie, H., Sun, L. N., & Mills, J. K. (2019). A survey of piezoelectric actuators with long working stroke in recent years: Classifications, principles, connections and distinctions. Mechanical Systems and Signal Processing, 123, 591–605. https://doi.org/10.1016/j.ymssp.2019.01.03310.1016/j.ymssp.2019.01.033 ↗
54. Wang, S. P., Rong, W. B., Wang, L. F., Pei, Z. C., & Sun, L. N. (2018). Novel design, analytical and experimental studies of a piezoelectric ultrasonic linear actuator based on binate feet driving. Journal of Intelligent Material Systems and Structures, 29(5), 787–799. https://doi.org/10.1177/1045389X1772104310.1177/1045389X17721043 ↗
55. Furutani, K., & Kawagoe, K. (2010). Influence of slope angle and traction load on performance of azarashi (seal) mechanism with one degree of freedom. IEEJ Transactions on Electrical and Electronic Engineering, 5(2), 181–187. https://doi.org/10.1002/tee.2051510.1002/tee.20515 ↗
56. Furutani, K. (2010). Performance of AZARASHI (Seal) positioning mechanism with friction control by inertial force. International Journal of the Japan Society for Precision Engineering, 76, 679–683.10.2493/jjspe.76.679 ↗
57. Neuman, J., Nováček, Z., Pavera, M., Zlámal, J., Kalousek, R., Spousta, J., Dittrichová, L., & Šikola, T. (2015). Experimental optimization of power-function-shaped drive pulse for stick-slip piezo actuators. Precision Engineering, 42, 187–194. https://doi.org/10.1016/j.precisioneng.2015.04.01610.1016/j.precisioneng.2015.04.016 ↗
58. Cheng, L., Liu, W. C., Yang, C. G., Huang, T. W., Hou, Z. G., & Tan, M. (2017). A neural-network-based controller for piezoelectric-actuated stick–slip devices. IEEE Transactions on Industrial Electronics, 65(3), 2598–2607. https://doi.org/10.1109/TIE.2017.274082610.1109/TIE.2017.2740826 ↗
59. Song, X., Wang, H. Q., Zhang, Y. K., Liu, W. M., Liu, L., & Peng, Y. X. (2020). A miniaturized dual-slider linear actuator using electrostatic adhesion and inertia drive. Actuators, 9(4), 114. https://doi.org/10.3390/act904011410.3390/act9040114 ↗
60. Peng, Y. X., Peng, Y. L., Gu, X. Y., Wang, J., & Yu, H. Y. (2015). A review of long range piezoelectric motors using frequency leveraged method. Sensors and Actuators A: Physical, 235, 240–255. https://doi.org/10.1016/j.sna.2015.10.01510.1016/j.sna.2015.10.015 ↗
61. Mohammad, T., & Salisbury, S. P. (2014). Design and assessment of a Z-axis precision positioning stage with centimeter range based on a piezoworm motor. IEEE/ASME Transactions on Mechatronics, 20(5), 2021–2030. https://doi.org/10.1109/TMECH.2014.236064410.1109/TMECH.2014.2360644 ↗
62. Deng, J., Zhang, S. J., Li, Y. Q., Ma, X. F., Gao, X., Xie, H., & Liu, Y. X. (2022). Development and experiment evaluation of a compact inchworm piezoelectric actuator using three-jaw type clamping mechanism. Smart Materials and Structures, 31(4), 045020. https://doi.org/10.1088/1361-665X/ac59da10.1088/1361-665X/ac59da ↗
63. Koh, J. S., & Cho, K. J. (2012). Omega-shaped inchworm-inspired crawling robot with large-index-and-pitch (LIP) SMA spring actuators. IEEE/ASME Transactions On Mechatronics, 18(2), 419–429. https://doi.org/10.1109/TMECH.2012.221103310.1109/TMECH.2012.2211033 ↗
64. Tahmasebipour, M., & Sangchap, M. (2019). A novel high performance integrated two-axis inchworm piezoelectric motor. Smart Materials and Structures, 29(1), 015034. https://doi.org/10.1088/1361-665X/ab545e10.1088/1361-665X/ab545e ↗
65. Shao, S. B., Song, S. Y., Liu, K. Y., & Xu, M. L. (2019). A piezo-driven rotary inchworm actuator featured with simple structure and high output torque. International Journal of Applied Electromagnetics and Mechanics, 59(1), 317–325. https://doi.org/10.3233/JAE-17117710.3233/JAE-171177 ↗
66. Sun, T. T., Wang, Y., & Yan, P. (2021). Analysis and variable step control of a bidirectional complementary-type inchworm actuator. Smart Materials and Structures, 30(4), 045019. https://doi.org/10.1088/1361-665X/abe33a10.1088/1361-665X/abe33a ↗
67. Ma, X. F., Liu, Y. X., Deng, J., Gao, X., & Cheng, J. F. (2023). A compact inchworm piezoelectric actuator with high speed: Design, modeling, and experimental evaluation. Mechanical Systems and Signal Processing, 184, 109704. https://doi.org/10.1016/j.ymssp.2022.10970410.1016/j.ymssp.2022.109704 ↗
68. Ling, J., Chen, L., Feng, Z., & Zhu, Y. C. (2022). Development and test of a high speed pusher-type inchworm piezoelectric actuator with asymmetric driving and clamping configuration. Mechanism and Machine Theory, 176, 104997. https://doi.org/10.1016/j.mechmachtheory.2022.10499710.1016/j.mechmachtheory.2022.104997 ↗
69. Ghodsi, M., Mohammadzaheri, M., Soltani, P., & Ziaifar, H. (2022). A new active anti-vibration system using a magnetostrictive bimetal actuator. Journal of Magnetism and Magnetic Materials, 557, 169463. https://doi.org/10.1016/j.jmmm.2022.16946310.1016/j.jmmm.2022.169463 ↗
70. Sun, T. T., & Yan, P. (2022). A novel high-speed bi-directional piezoelectric inchworm actuator based on flexible supported baffles. Smart Materials and Structures, 31(9), 095014. https://doi.org/10.1088/1361-665X/ac7dce10.1088/1361-665X/ac7dce ↗
71. Shao, S. B., Song, S. Y., Shao, Y., & Xu, M. L. (2022). Long-range piezoelectric actuator with large load capacity using inchworm and stick-slip driving principles. Precision Engineering, 75, 167–179. https://doi.org/10.1016/j.precisioneng.2022.02.00710.1016/j.precisioneng.2022.02.007 ↗
72. Vo, T. V. K., Lubecki, T. M., Chow, W. T., Gupta, A., & Li, K. H. H. (2021). Large-scale piezoelectric-based systems for more electric aircraft applications. Micromachines, 12(2), 140. https://doi.org/10.3390/mi1202014010.3390/mi12020140 ↗
73. Wang, F. J., Zhao, X. L., Huo, Z. C., Shi, B. C., Tian, Y. L., & Zhang, D. W. (2022). A novel large stepping-stroke actuator based on the bridge-type mechanism with asymmetric stiffness. Mechanical Systems and Signal Processing, 179, 109317. https://doi.org/10.1016/j.ymssp.2022.10931710.1016/j.ymssp.2022.109317 ↗
74. Bian, L., Li, Z. M., Qi, X. D., Sun, Y., Jiang, G. C., Zhao, B., Yang, B., & Dong, S. X. (2022). Low-temperature sintered PMnS–PZT multilayer-ceramic for nano-step piezomotor application. Sensors and Actuators A: Physical, 345, 113812. https://doi.org/10.1016/j.sna.2022.11381210.1016/j.sna.2022.113812 ↗
75. Yun, H., Kong, D. Q., & Aoyagi, M. (2022). Development of a multi-drive-mode piezoelectric linear actuator with parallel-arrangement dual stator. Precision Engineering, 77, 127–140. https://doi.org/10.1016/j.precisioneng.2022.05.01410.1016/j.precisioneng.2022.05.014 ↗
76. Deng, J., Liu, Y. X., Li, J., Zhang, S. J., & Li, K. (2022). Displacement linearity improving method of stepping piezoelectric platform based on leg wagging mechanism. IEEE Transactions on Industrial Electronics, 69(6), 6429–6432. https://doi.org/10.1109/TIE.2021.309447710.1109/TIE.2021.3094477 ↗
77. Li, J. P., Huang, H., & Morita, T. (2019). Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review. Sensors and Actuators A: Physical, 292, 39–51. https://doi.org/10.1016/j.sna.2019.04.00610.1016/j.sna.2019.04.006 ↗
78. Pu, Y. X., Zhou, H. L., & Meng, Z. (2019). Multi-channel adaptive active vibration control of piezoelectric smart plate with online secondary path modelling using PZT patches. Mechanical Systems and Signal Processing, 120, 166–179. https://doi.org/10.1016/j.ymssp.2018.10.01910.1016/j.ymssp.2018.10.019 ↗
79. Hunstig, M. (2017). Piezoelectric inertia motors—A critical review of history, concepts, design, applications, and perspectives. Actuators, 6(1), 7. https://doi.org/10.3390/act601000710.3390/act6010007 ↗
80. Wang, L., Chen, W. S., Liu, J. K., Deng, J., & Liu, Y. X. (2019). A review of recent studies on non-resonant piezoelectric actuators. Mechanical Systems and Signal Processing, 133, 106254. https://doi.org/10.1016/j.ymssp.2019.10625410.1016/j.ymssp.2019.106254 ↗
81. Yang, Z. X., Zhou, X. Q., Huang, H., Dong, J. S., Fan, Z. Q., & Zhao, H. W. (2019). On the suppression of the backward motion of a piezo-driven precision positioning platform designed by the parasitic motion principle. IEEE Transactions on Industrial Electronics, 67(5), 3870–3878. https://doi.org/10.1109/TIE.2019.291629510.1109/TIE.2019.2916295 ↗
82. Mohith, S., Upadhya, A. R., Navin, K. P., Kulkarni, S. M., & Rao, M. (2021). Recent trends in piezoelectric actuators for precision motion and their applications: A review. Smart Materials and Structures, 30(1), 013002. https://doi.org/10.1088/1361-665X/abc6b910.1088/1361-665X/abc6b9 ↗
83. Salim, M., Salim, D., Chandran, D., Aljibori, H. S., & Kherbeet, A. S. (2018). Review of nano piezoelectric devices in biomedicine applications. Journal of Intelligent Material Systems and Structures, 29(10), 2105–2121. https://doi.org/10.1177/1045389X1775427210.1177/1045389X17754272 ↗
84. Sun, W. X., Xu, Z., Wang, K. F., Li, X., Tang, J. Y., Yang, Z. J., & Huang, H. (2023). An impact inertial piezoelectric actuator designed by means of the asymmetric friction. IEEE Transactions on Industrial Electronics, 70(1), 699–708. https://doi.org/10.1109/TIE.2022.315380710.1109/TIE.2022.3153807 ↗
85. Ding, Z. C., Dong, J. S., Zhou, X. Q., Xu, Z., Qiu, W., & Shen, C. L. (2022). Achieving smooth motion of stick–slip piezoelectric actuator by means of alternate stepping. Mechanical Systems and Signal Processing, 181, 109494. https://doi.org/10.1016/j.ymssp.2022.10949410.1016/j.ymssp.2022.109494 ↗
86. Yang, Z. X., Zhou, X. Q., & Huang, H. (2022). Design, analysis and experiments of a stick-slip piezoelectric actuator working under the self-deformation mode. Smart Materials and Structures, 31(10), 105010. https://doi.org/10.1088/1361-665X/ac8b4810.1088/1361-665X/ac8b48 ↗
87. Shao, Y., Shao, S. B., Zhai, C. P., Song, S. Y., Han, W. W., Xu, M. L., & Ren, B. (2022). Development of a frequency-controlled inertial type piezoelectric locomotion method with nano-scale motion resolution driven by a symmetrical waveform. Mechanical Systems and Signal Processing, 177, 109271. https://doi.org/10.1016/j.ymssp.2022.10927110.1016/j.ymssp.2022.109271 ↗
88. Sun, W. X., Liu, Y. W., Li, X., Xu, Z., Yang, Z. J., & Huang, H. (2022). An inertial impact piezoelectric actuator designed by the asymmetric friction principle and achieved by laser texturing of the driving feet. Actuators, 11(8), 211. https://doi.org/10.3390/act1108021110.3390/act11080211 ↗
89. Qiao, G. D., Ning, P., Gao, Q., Yu, Y., Lu, X. H., Yang, S. T., & Cheng, T. H. (2022). A flexure hinged mpiezoelectric stick–slip actuator with high velocity and linearity for long-stroke nano-positioning. Smart Materials and Structures, 31(7), 075017. https://doi.org/10.1088/1361-665X/ac742810.1088/1361-665X/ac7428 ↗
90. Ji, H. W., Lv, B., Li, Y. H., Yang, F., Qi, A. Q., Wu, X., & Ni, J. (2022). Design and research on tuning fork piezoelectric actuator based on stick-slip effect. Review of Scientific Instruments, 93(6), 065007. https://doi.org/10.1063/5.008905210.1063/5.0089052 ↗
91. Deng, J., Liu, S. H., Liu, Y. X., Wang, L., Gao, X., & Li, K. (2021). A 2-DOF needle insertion device using inertial piezoelectric actuator. IEEE Transactions on Industrial Electronics, 69(4), 3918–3927. https://doi.org/10.1109/TIE.2021.307331310.1109/TIE.2021.3073313 ↗
92. Deng, J., Liu, Y. X., Li, J., Zhang, S. J., & Xie, H. (2022). Influence of multidirectional oscillations on output characteristics of inertial piezoelectric platform. IEEE/ASME Transactions on Mechatronics, 27(5), 4122–4131. https://doi.org/10.1109/TMECH.2022.315110210.1109/TMECH.2022.3151102 ↗
93. Wang, L., Hou, Y. J., Zhao, K. D., Shen, H., Wang, Z. W., Zhao, C. S., & Lu, X. L. (2019). A novel piezoelectric inertial rotary motor for actuating micro underwater vehicles. Sensors and Actuators A: Physical, 295, 428–438. https://doi.org/10.1016/j.sna.2019.06.01410.1016/j.sna.2019.06.014 ↗
94. Saadabad, N. A., Moradi, H., & Vossoughi, G. (2019). Dynamic modeling, optimized design, and fabrication of a 2DOF piezo-actuated stick-slip mobile microrobot. Mechanism and Machine Theory, 133, 514–530. https://doi.org/10.1016/j.mechmachtheory.2018.11.02510.1016/j.mechmachtheory.2018.11.025 ↗
95. Zhang, Y. K., Peng, Y. X., Sun, Z. X., & Yu, H. Y. (2018). A novel stick–slip piezoelectric actuator based on a triangular compliant driving mechanism. IEEE Transactions on Industrial Electronics, 66(7), 5374–5382. https://doi.org/10.1109/TIE.2018.286827410.1109/TIE.2018.2868274 ↗
96. Wang, X. Y., Zhu, L. M., & Huang, H. (2020). A dynamic model of stick-slip piezoelectric actuators considering the deformation of overall system. IEEE Transactions on Industrial Electronics, 68(11), 11266–11275. https://doi.org/10.1109/TIE.2020.303292210.1109/TIE.2020.3032922 ↗
97. Dong, J. S., Zhang, B. W., Li, X. T., Xu, Z., Wang, J. R., Liu, C., & Cao, Y. (2021). A stick-slip piezoelectric actuator with suppressed backward motion achieved using an active locking mechanism (ALM). Smart Materials and Structures, 30(9), 095015. https://doi.org/10.1088/1361-665X/ac0cbd10.1088/1361-665X/ac0cbd ↗
98. Li, J. P., He, L. D., Cai, J. J., Hu, Y. L., Wen, J. M., Ma, J. J., & Wan, N. (2021). A walking type piezoelectric actuator based on the parasitic motion of obliquely assembled PZT stacks. Smart Materials and Structures, 30(8), 085030. https://doi.org/10.1088/1361-665X/ac09a010.1088/1361-665X/ac09a0 ↗
99. Wang, L., Jin, J. M., Zhang, H. X., Wang, F. Y., & Jiang, Z. (2020). Theoretical analysis and experimental investigation on a novel self-moving linear piezoelectric stepping actuator. Mechanical Systems and Signal Processing, 135, 106183. https://doi.org/10.1016/j.ymssp.2019.06.00110.1016/j.ymssp.2019.06.001 ↗
100. Bansevicius, R., Mazeika, D., Jurenas, V., Kulvietis, G., & Drukteiniene, A. (2019). Multi-DOF ultrasonic actuators for laser beam positioning. Shock and Vibration, 2019, 4919505. https://doi.org/10.1155/2019/491950510.1155/2019/4919505 ↗