Chemistry for electron-induced nanofabrication
Source abstract
Abstract
ImPhys/Charged Particle Optics
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Source: openaire · Quality: needs review · Source record ↗
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Source flags: short_text
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (32)
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