DataVXJournal of Asian Ceramic SocietiesPaper
journal article·2020-04-02Open access

Fabrication of (a-nc) boron carbide thin films via chemical vapor deposition using ortho-carborane

Rong Tu, Xuan HU, Jun Li, Meijun Yang, Qizhong Li, Ji Shi, Haiwen Li, Hitoshi Ohmori, Takashi Goto, Song Zhang

Journal of Asian Ceramic Societies· Volume 8· Issue 2
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Source abstract

Abstract

Amorphous-nanocrystalline (a-nc) boron carbide thin films were prepared by chemical vapor deposition (CVD) by using ortho-carborane as a single-source precursor for inertial confinement fusion (ICF) application. The effects of deposition temperature (Tdep) and total pressure (Ptot) on chemical composition, microstructure, stoichiometry and morphology of the boron carbide films were investigated. The TEM results show that the structure of the film is mainly composed of amorphous boron carbide with dispersive nano-grains, which will be able to improve the mechanical properties of the film with relatively low roughness. The hardness of the (a-nc) boron carbide film obtained in this study reached 20.6 GPa, and roughness of 3.21 nm. The deposited films sized 0.2–1.9 μm in thickness with B/C atomic ratio ranged from 0.14 to 3.29. The deposition rate decreased with increasing deposition temperature and Ptot, while B/C ratio increased.
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Research context

NanomaterialsMaterials processing

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Ion-surface interactions and analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan, People’s Republic of China

National Key Laboratory for Shock Wave and Detonation Physics, Institute of Fluid Physics, Mianyang, People’s Republic of China

Hubei Key Laboratory Advanced Technology of Automobile Parts, Wuhan University of Technology, Wuhan, People’s Republic of China

School of Materials and Chemical Technology, Tokyo Institute of Technology, Tokyo, Japan

Materials Fabrication Laboratory, International Research Center for Hydrogen Energy, Kyushu University, Fukuoka, Japan

Institute of Physical and Chemical Research, Wako, Japan

Funding

National Natural Science Foundation of China · 111 Project · Technological Innovation of Hubei Province · Joint Fund of Ministry of Education for Pre-research of Equipment · International Science & Technology Cooperation Program of China · Science Challenge Project

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