Static friction in elastic adhesion contacts in MEMS
Source abstract
Abstract
Static friction in a shearing mode can be expressed as the product of the shear strength of the interface and the real contact area. The influence of roughness on friction in elastic adhesion contact is analyzed. The effect of adhesion is included using Maugis' expansion of the Greenwood and Williamson model. Special attention is paid to low loading conditions, in which the number of contact points is small and the statistical models fail. A discrete contact model is proposed for this regime. The models are used to analyze friction experiments in a MEMS friction meter. The measured friction force as a function of the load can be explained by the discrete contact model, assuming three contact points.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Adhesion, Friction, and Surface Interactions · Force Microscopy Techniques and Applications · Advanced MEMS and NEMS Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (43)
Show source-provided references
1. Tai Y.-C. · Sensors and Actuators · 1990 · 21 · 18010.1016/0924-4247(90)85034-2 ↗
2. Mehregany, M., Nagarkar, P., Senturia, S. D. and Lang, J. H. 1990.Proc. IEEE Workshop on MEMS1–8. Napa Valley, CA
3. Kaneko, R. 1991.Proc. IEEE Workshop on MEMS1–8. Nara, Japan
4. Yeh, R., Kruglick, E. J. J. and Pister, K. S. J. 1995.Proc. 8th Int. Conf. on Solid-State Sensors and Actuators (Transducers '95) and Eurosensors IX346–349. Stockholm, Sweden10.1109/SENSOR.1995.721817 ↗
5. Lim, M. G., Chang, J. C., Schultz, D. P., Howe, R. T. and White, R. M. 1990.Proc. IEEE Workshop on MEMS82–88. Napa Valley, CA10.1109/MEMSYS.1990.110254 ↗
6. Gabriel K. J. · Sensors and Actuators · 1990 · 21 · 18410.1016/0924-4247(90)85035-3 ↗
7. Mehregany, M. 1990.Technical Digest of the IEEE Solid-State Sensors and Actuators Workshop17–22. Hilton Head Island, SC10.1109/SOLSEN.1990.109811 ↗
8. Suzuki, S., Matsuura, T., Uchizawa, M., Yura, S. and Shibata, H. 1991.Proc. IEEE Workshop on MEMS143–147. Nara, Japan10.1109/MEMSYS.1991.114785 ↗
9. Noguchi, K., Fujita, H. and Suzuki, M. 1991.Proc. IEEE Workshop on MEMS148–153. Nara, Japan10.1109/MEMSYS.1991.114786 ↗
10. Mehregany M. · J. Micromech. Microeng. · 1991 · 1 · 7310.1088/0960-1317/1/2/001 ↗
11. Deng K. · J. Micromech. Microeng. · 1992 · 2 · 1410.1088/0960-1317/2/1/004 ↗
12. Mehregany M. · IEEE Trans. Electron Devices · 1992 · 39 · 206010.1109/16.155878 ↗
13. Huang J.-B. · Sensors and Actuators · 1993 · 35 · 17110.1016/0924-4247(93)80147-9 ↗
14. Garcia E. J. · Sensors and Actuators · 1995 · 48 · 20310.1016/0924-4247(95)00999-X ↗
15. Beerschwinger U. · Sensors and Actuators · 1997 · 63 · 22910.1016/S0924-4247(97)80510-9 ↗
16. Komvopoulos K. · Wear · 1996 · 200 · 30510.1016/S0043-1648(96)07328-0 ↗
17. Greenwood J. A. · Proc. R. Soc. London A · 1966 · 295 · 30010.1098/rspa.1966.0242 ↗
18. 10.1163/156856196X0083210.1163/156856196X00832 ↗
19. Majumdar, A. and Bhushan, B. 1997.Handbook of Micro- and Nano Tribology, 2nd edn, Edited by: Bhushan, B. 187–245. Boca Raton, FL: CRC Press.
20. Alley, R. L., Mai, P., Komvopoulos, K. and Howe, R. T. 1993.Proc. 7th Int. Conf. on Solid-State Sensors and Actuators (Transducers '93)288–291. Yokohama, Japan
21. Gui C. · J. Appl. Phys. · 1999 · 85 · 744810.1063/1.369377 ↗
22. Tas, N. R., Sonnenberg, A. H., Sander, A. F. M. and Elwenspoek, M. 1997.Proc. IEEE Workshop on MEMS215–220. Nagoya, Japan10.1109/MEMSYS.1997.581806 ↗
23. Bowden F. P. · 1950
24. Tabor D. · J. Lubrication Technol. · 1981 · 103 · 16910.1115/1.3251622 ↗
25. Clechet P. · Sensors and Actuators · 1994 · 44 · 7710.1016/0924-4247(94)00777-2 ↗
26. Zarrad H. · Sensors and Actuators · 1995 · 46 · 59810.1016/0924-4247(94)00970-S ↗
27. Deng K. · J. Electrochem. Soc. · 1995 · 142 · 127810.1149/1.2044164 ↗
28. Bhushan, B. 1996.Proc. IEEE Workshop on MEMS349–353. San Diego, CA
29. Srinivasan, U., Foster, J. D., Habib, U., Howe, R. T., Maboudian, R., Cowell Senft, D. and Dugger, M. T. 1998.Technical Digest of the IEEE Solid-State Sensors and Actuator Workshop156–161. Hilton Head Island, SC10.31438/trf.hh1998.34 ↗
30. Landau, L. D. and Lifshitz, E. M. 1975.Elastizitaetstheorie, 34–39. Berlin: Akademie Verlag.
31. Timoshenko, S. P. and Goodier, J. N. 1970.Theory of Elasticity, 409–413. New York: McGraw-Hill.10.1115/1.3408648 ↗
32. Derjaguin B. V. · J. Colloid Interface Sci. · 1975 · 53 · 31410.1016/0021-9797(75)90018-1 ↗
33. Israelachvili, J. N. 1991.Intermolecular and Surface Forces, 2nd edn, 330–332. London: Academic Press.
34. Johnson K. L. · Proc. R. Soc. Lond. A · 1971 · 324 · 30110.1098/rspa.1971.0141 ↗
35. Tabor D. · Colloid Interface Sci. · 1977 · 58 · 210.1016/0021-9797(77)90366-6 ↗
36. Polycarpou, A. A. and Suh, A. 2001.Fundamentals of Tribology and Bridging the Gap between the Macro- and Micro/Nanoscales, Edited by: Bhushan, B. 331Dordrecht: Kluwer Academic Publishers.10.1007/978-94-010-0736-8_21 ↗
37. Archard J. F. · Tribology Int. · 1974 · 7 · 21310.1016/0301-679X(74)90041-3 ↗
38. Fuller K. N. G. · Proc. R. Soc. London A · 1975 · 345 · 32710.1098/rspa.1975.0138 ↗
39. Prasad, R., MacDonald, N. and Taylor, D. 1995.Proc. 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95) and Eurosensors IX52–55. Stockholm, Sweden10.1109/SENSOR.1995.721742 ↗
40. Tas N. R. · 2000
41. Stengl R. · Jap. J. App. Phys. · 1989 · 28 · 173510.1143/JJAP.28.1735 ↗
42. Tas N. R. · J. Micromech. Microeng. · 1996 · 6 · 38510.1088/0960-1317/6/4/005 ↗
43. Sundararajan S. · Wear · 1998 · 217 · 25110.1016/S0043-1648(98)00169-0 ↗