Adhesion of gold and copper thin films deposited on alumina and magnesium oxide
Source abstract
Abstract
Scratch and pull-off methods for adhesion measurement were applied to various film/ substrate systems. The film crystallographic structure was investigated by transmission electron microscopy (TEM) in order to correlate it to the adhesion strength. We also correlate the film and substrate electronic structures (in particular the electronegativity) to the adhesion strength. The results of adhesion measurement are also discussed with respect to the substrate temperature. The main results are that the adhesion strength is greater when the film is deposited on magnesium oxide than on alumina substrates, and for the copper than for the gold deposit. Also, the adhesion strength increases with the substrate temperature.
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Surface and Thin Film Phenomena · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (50)
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1. Mittal, K. L. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 5–17. Philadelphia: American Society for Testing and Materials.10.1520/STP640-EB ↗
2. Mittal, K. L. 1995.Adhesion Measurement of Films and Coatings, Edited by: Mittal, K. L. 1–13. Utrecht, The Netherlands: VSP.10.1515/9783112318966-002 ↗
3. Mittal K. L. · 197810.1520/STP640-EB ↗
4. Klingenmaier, O. J. and Dobrash, S. M. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 369–390. Philadelphia: American Society for Testing and Materials.10.1520/STP38644S ↗
5. Krongelb, S. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 107–121. Philadelphia: American Society for Testing and Materials.10.1520/STP38628S ↗
6. Dannenberg H. · J. Appl. Polym. Sci. · 1961 · 5 · 12510.1002/app.1961.070051401 ↗
7. Allen M. G. · J. Adhesion · 1988 · 25 · 30310.1080/00218468808071269 ↗
8. Wan K. T. · Acta Metall. Mater. · 1995 · 43 · 410910.1016/0956-7151(95)00108-8 ↗
9. Wan K. T. · Mater. Sci. Res. Int. · 1995 · 1 · 78
10. Sizemore J. · Mater. Res. Soc. Symp. Proc. · 1995 · 383 · 19710.1557/PROC-383-197 ↗
11. Bosseboeuf A. · Microsc. Microstruct. Microanal. · 1997 · 8 · 26110.1051/mmm:0199700804-5026100 ↗
12. Heavens O. S. · J. Phys. Radium · 1950 · 11 · 35510.1051/jphysrad:01950001107035500 ↗
13. Benjamin P. · Proc. R. Soc. London, Ser. A · 1960 · 254 · 16310.1098/rspa.1960.0012 ↗
14. Butler D. W. · J. Phys. D: Appl. Phys. · 1970 · 1 · 887
15. Oroshnik, J. and Croll, W. K. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 158–183. Philadelphia: American Society for Testing and Materials.10.1520/STP38631S ↗
16. Chopra, K. L. 1969.Thin Film Phenomena, 313–323. New York: McGraw-Hill.
17. Hamersky J. · Thin Solid Films · 1969 · 3 · 26310.1016/0040-6090(69)90120-5 ↗
18. Goldstein L. F. · J. Vac. Sci. Technol. · 1975 · 12 · 142310.1116/1.568554 ↗
19. Ahn, J., Mittal, K. L. and MacQueen, R. H. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 134–157. Philadelphia: American Society for Testing and Materials.10.1520/STP640-EB ↗
20. Venkataraman S. K. · Thin Solid Films · 1993 · 223 · 26910.1016/0040-6090(93)90532-T ↗
21. Mittal K. L. · 199510.1515/9783112318966-002 ↗
22. Ollivier, B. and Matthews, A.Adhesion Measurement of Films and Coatings, Edited by: Mittal, K. L. 103–114. Utrecht: VSP.
23. Ramos, F. and Vieira, M. T. 1995.Adhesion Measurement of Films and Coatings, Edited by: Mittal, K. L. 115–126. Utrecht: VSP.10.1515/9783112318966-009 ↗
24. Kattamis, T. Z. 1995.Adhesion Measurement of Films and Coatings, Edited by: Mittal, K. L. 143–160. Utrecht: VSP.10.1515/9783112318966-011 ↗
25. Sarin, V. K. 1995.Adhesion Measurement of Films and Coatings, Edited by: Mittal, K. L. 175–188. Utrecht: VSP.10.1515/9783112318966-013 ↗
26. Butler D. W. · J. Phys. E: Sci. Instrum. · 1970 · 3 · 97910.1088/0022-3735/3/12/307 ↗
27. Katz G. · Thin Solid Films · 1976 · 33 · 9910.1016/0040-6090(76)90591-5 ↗
28. Kuwahara, K., Hirota, H. and Umemoto, N. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 198–207. Philadelphia: American Society for Testing and Materials.10.1520/STP38633S ↗
29. Pawel J. E. · J. Adhesion Sci. Technol. · 1993 · 7 · 84510.1163/156856193X00475 ↗
30. Schmidbauer S. · Surface Coatings Technol. · 1993 · 59 · 32510.1016/0257-8972(93)90106-X ↗
31. Alam, M., Peebles, D. E. and Ohlhausen, J. A. 1995.Adhesion Measurement of Films and Coatings, Edited by: Mittal, K. L. 331–344. Utrecht: VSP.10.1515/9783112318966-022 ↗
32. Pedraza A. J. · J. Appl. Phys. · 1995 · 77 · 517610.1063/1.359264 ↗
33. Bateson S. · Vacuum · 1952 · 2 · 36510.1016/0042-207X(52)93785-8 ↗
34. Vossen, J. L. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 122–133. Philadelphia: American Society for Testing and Materials.10.1520/STP38629S ↗
35. Faure, R. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 184–197. Philadelphia: American Society for Testing and Materials.10.1520/STP38632S ↗
36. Murr, L. E. 1978.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, ASTM STP 640 Edited by: Mittal, K. L. 82–98. Philadelphia: American Society for Testing and Materials.10.1520/STP38626S ↗
37. Chatain D. · J. Chim. Phys. · 1986 · 83 · 56110.1051/jcp/1986830561 ↗
38. Chatain D. · Rev. Phys. Appl. · 1988 · 23 · 105510.1051/rphysap:019880023060105500 ↗
39. Eustathopoulos N. · J. Phys. III · 1994 · 4 · 1865
40. Kritsalis P. · J. Mater. Sci. Lett. · 1990 · 9 · 133210.1007/BF00726537 ↗
41. Drevet B. · J. Chim. Phys. · 1990 · 87 · 11710.1051/jcp/1990870117 ↗
42. Gillet E. · J. Chem. Phys. · 1987 · 84 · 167
43. Gillet E. · Surface Sci. · 1992 · 273 · 42710.1016/0039-6028(92)90079-L ↗
44. Gillet E. · Surface Interface Anal. · 1990 · 16 · 46110.1002/sia.740160195 ↗
45. He J. W. · Surface Sci. · 1987 · 180 · 41110.1016/0039-6028(87)90217-2 ↗
46. Alstrup I. B. · Appl. Surface Sci. · 1988 · 33 · 14310.1016/0169-4332(88)90299-1 ↗
47. Gautier M. · Surface Sci. Lett. · 1991 · 249 · L32710.1016/0039-6028(91)90822-A ↗
48. Ealet B. · Surface Sci. · 1993 · 281 · 9110.1016/0039-6028(93)90858-H ↗
49. Ealet B. · Surface Sci. · 1996 · 367 · 22110.1016/S0039-6028(96)00865-5 ↗
50. Jonnard P. · Surface Rev. Lett. · 1998 · 5 · 36910.1142/S0218625X98000682 ↗