Adhesion of vacuum-deposited thin cobalt metal film to poly(ethylene terephthalate) pretreated with RF plasma

Specific polar groups were introduced on a poly(ethylene terephthalate) (PET) film surface by radio-frequency (RF) plasma treatment. These polar groups were analyzed quantitatively by ESCA, and their effect on the adhesion strength of vacuum-deposited thin cobalt metal film on the plasma-treated PET film surface was investigated. Hydroperoxide and hydroxyl groups introduced onto the PET film surface by RF plasma under an argon or oxygen atmosphere greatly increased the adhesion strength. In particular, oxygen plasma treatment at high RF power was most effective. A large number of amino groups were introduced by the ammonia plasma treatment, but they did not increase the adhesion strength.