Surface engineering for reliable operation of MEMS devices
Source abstract
Abstract
Abstract Despite two decades of rapid development and growth, MEMS technology is still plagued by reliability problems. Tribological issues, inherent in the microscopic lengthscale characteristics of MEMS, are recognized as central to MEMS reliable performance. This article presents a brief review of these issues (in particular of stiction) and of solutions proposed to tackle them in a variety of silicon—as well as non-silicon based MEMS. Keywords: MEMSstictiontribologyreliability.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Force Microscopy Techniques and Applications · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (45)
Show source-provided references
1. Muller R. S. · 1990
2. Sze S. M. · 1994
3. Bryzek J. · IEEE Spectrum · 1994 · 31 · 2010.1109/6.278394 ↗
4. Trimmer W. S. · 1996
5. Madou M. J. · 1997
6. Howe R. T. · J. Vac. Sci. Technol. B · 1988 · 6 · 180910.1116/1.584158 ↗
7. Muller R. S. · Sensors and Actuators · 1990 · 21 · 110.1016/0924-4247(90)85001-K ↗
8. Petersen K. · Proc. IEEE Electron Devices · 1982 · 70 · 42010.1109/PROC.1982.12331 ↗
9. Komvopoulos K. · Wear · 1996 · 200 · 30510.1016/S0043-1648(96)07328-0 ↗
10. Tas N. · J. Micromech. Microeng. · 1996 · 6 · 38510.1088/0960-1317/6/4/005 ↗
11. Mastrangelo C. H. · Tribology Lett. · 1997 · 3 · 22310.1023/A:1019133222401 ↗
12. Maboudian R. · J. Vac. Sci. Technol. B · 1997 · 15 · 110.1116/1.589247 ↗
13. Maboudian R. · Surface Sci. Reports · 1998 · 30 · 20710.1016/S0167-5729(97)00014-9 ↗
14. Maboudian R. · MRS Bulletin · 1998 · 23 · 4710.1557/S0883769400030633 ↗
15. Rymuza Z. · Microsystem Technologies · 1999 · 5 · 17310.1007/s005420050160 ↗
16. Bhushan B. · 199810.1007/978-94-011-5050-7 ↗
17. de Boer M. P. · MRS Bulletin · 2001 · 26 · 30210.1557/mrs2001.65 ↗
18. Henck S. · Tribology Lett. · 1997 · 3 · 23910.1023/A:1019129021492 ↗
19. Miller S. L. · Microelectronics Reliability · 1999 · 39 · 122910.1016/S0026-2714(99)00013-X ↗
20. Maboudian R. · Tribology Lett. · 1997 · 3 · 21510.1023/A:1019185206471 ↗
21. Kim C.-J. · Sensors and Actuators · 1998 · 64 · 1710.1016/S0924-4247(98)80053-8 ↗
22. Guckel H. · Sensors and Actuators · 1990 · 21 · 46
23. Mulhern, G. T., Soane, D. S. and Howe, R. T. 1993.Proc. 7th Int. Conf. on Solid-State Sensors and Actuators— Transducers '93296–300. Yokohama, Japan
24. Mastrangelo, C. H. and Saloka, G. S. 1993.Proc. IEEE Micro-Electro-Mechanical Systems Workshop77–81. Ft. Lauderdale, FL10.1109/MEMSYS.1993.296955 ↗
25. Kobayashi D. · Jpn. J. Appl. Phys. · 1993 · 32 · L 164210.1143/JJAP.32.L1642 ↗
26. Kozlowski, F., Lindmair, N., Scheiter, Th., Hierold, C. and Lang, W. 1995.Proc. 8th Int. Conf. on Solid-State Sensors and Actuators — Transducers '95220–223. Stockholm, Sweden10.1109/SENSOR.1995.717148 ↗
27. Lee J. H. · Sensors and Actuators · 1998 · 64 · 2710.1016/S0924-4247(98)80054-X ↗
28. Srinivasan U. · J. MEMS · 1998 · 7 · 25210.1109/84.679393 ↗
29. Maboudian R. · Sensors and Actuators · 2000 · 82 · 21910.1016/S0924-4247(99)00337-4 ↗
30. Maboudian R. · Tribology Lett. · 2002 · 12 · 9510.1023/A:1014044207344 ↗
31. Zhu X. Y. · Tribology Lett. · 1999 · 7 · 8710.1023/A:1019169303629 ↗
32. Zhu X. Y. · Langmuir · 2000 · 16 · 676610.1021/la9915264 ↗
33. Sakata, J., Tsuchiya, T., Inoue, A., Tokumitsu, S. and Funabashi, H. 1999.Proceed. 10th Int. Conf. Solid-State Sensors and Actuators, Transducers '9926–29. Sendai, Japan
34. Mayer T. M. · J. Vac. Sci. Technol. B · 2000 · 18 · 243310.1116/1.1288200 ↗
35. Bhattacharya, E., Kuang, J., Judy, M. and Martin, J. 2000. Proceedings of International Workshop on Physics of Semiconductor Devices. 2000, Delhi, India.
36. Bhattacharya E. · 2001
37. Man P. F. · J. MEMS · 1997 · 6 · 2510.1109/84.557527 ↗
38. Smith B. K. · Sensors and Actuators · 1998 · 70 · 15910.1016/S0924-4247(98)00127-7 ↗
39. Yeh J. L. A. · J. MEMS · 2000 · 9 · 28110.1109/84.870052 ↗
40. Ulman A. · 1991
41. Magagnin L. · Electrochemical Solid-State Lett. · 2001 · 4 · C510.1149/1.1344280 ↗
42. Magagnin L. · Electrochimica Acta
43. Mehregany M. · Thin Solid Films · 1999 · 355 · 51810.1016/S0257-8972(99)00374-6 ↗
44. Stoldt C. R. · Appl. Phys. Lett. · 2001 · 79 · 34710.1063/1.1383277 ↗
45. Sullivan J. P. · MRS Bulletin · 2001 · 26 · 30910.1557/mrs2001.68 ↗