Thermophoretic Control of Submicron-sized Particulate Recontamination
Source abstract
Abstract
Abstract Thermophoresis is the movement of particles in a thermal gradient. It has the advantages of being simple to set up and to carry out. Here, it is used to prevent the recontamination of emitted particles smaller than 0.5 μm during the dry laser cleaning of particles not chemically bound to the substrate. Its use permits the efficiency of such dry laser cleaning to be greatly improved. A comparison between the thermophoretic and laminar flow techniques is carried out, showing that thermophoresis is more efficient.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Particle Dynamics in Fluid Flows · Laser-Ablation Synthesis of Nanoparticles · Laser-induced spectroscopy and plasma
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
a Groupe de Recherche en Physique et Technologie des Couches Minces, Département de Génie Physique et de Génie des Matériaux , École Polytechnique de Montréal , C.P. 6079, Succursale Centre-Ville, Montréal, Québec , H3C 3A7 , Canada
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