journal article·2026-06-15Open access

In Situ Monitoring of Lithium Battery Separator by Low-Voltage Scanning Electron Microscopy

Lei Wang, Ruisheng Zhang, Yang Yu, Qin Luo, Xiaowei Fang, Yu Deng

Applied Sciences· Volume 16· Issue 12

Abstract

Scanning electron microscopy (SEM) is a popular surface characterization technique. However, SEM observation and measurement of nonconducting soft materials still suffer from the charge effect and beam damage caused by high landing energy. In this work, a low-voltage SEM (LVSEM) was employed to directly observe and record the in situ beam damage of nonconducting polymer films. A series of unprecedented high-quality surface structure images of the nonconducting materials was obtained by controlling the landing energy of the incident electron beam.
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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Electrohydrodynamics and Fluid Dynamics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China

National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Science and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China

Carl Zeiss (Shanghai) Co., Ltd., Shanghai 200131, China

Hitachi High-Tech (Shanghai) Co., Ltd., Shanghai 201203, China

Hefei Guojing Instrument Technology Co., Ltd., Hefei 230061, China

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